Comparison ledger
ABM -407B-1-S-CES293 Robot, Advanced Energy Apex, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ApexAdvanced Energy | |
|---|---|---|
| OEM | ABM | Advanced Energy |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Advanced Energy Apex |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Output Frequency | — | 13.56 MHz[3] |
| Input Voltage | — | 208 VAC[3] |
| Power Level Range | — | 1.5 kW to 10 kW[3] |
| Form Factor (Models 1.5, 3, 5.5 kW) | — | 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D)[1] |
| Form Factor (Model 10 kW) | — | 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D) (3U 19" rack)[1] |
| Cooling | — | Water[3] |
| Communications Interfaces | — | RS-232, Analog, Ethernet, DeviceNet[3] |
| Advanced Features | — | Pulsing, CEX[3] |
| Forward Power Regulation | — | ±1% of set point or ±0.1% full-rated output power, whichever is greater, into 50 Ω non-reactive load[1] |
| Load Power Regulation | — | ±3% of load power into a 3:1 VSWR non-reactive load[1] |
| Ambient Operating Temperature | — | 5 °C to 40 °C[1] |
| Water Coolant Temperature | — | 35 °C max[1] |
| Product type | — | RF generator family and power-delivery systems[3] |
| Power level | — | 1.5 to 10 kW[3] |
| Rack width | — | 1/2 rack and full rack[3] |
| Height | — | 3U[3] |
| Communications interface | — | RS-232, analog, ethernet, DeviceNet[3] |
| Process applications | — | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE[3] |
| RF Output Power and Regulation (1.5 kW model) | — | 1.5 kW into 50 Ω non-reactive load[1] |
| RF Output Power and Regulation (3 kW model) | — | 3 kW into 50 Ω non-reactive load[1] |
| RF Output Power and Regulation (5.5 kW model) | — | 5.5 kW into 50 Ω non-reactive load[1] |
| RF Output Power and Regulation (10 kW model) | — | 10 kW into 50 Ω non-reactive load[1] |
| Dimensions (1.5 kW, 3 kW, 5.5 kW models) | — | 132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D)[1] |
| Dimensions (10 kW model) | — | 133.35 mm (H) x 482.6 mm (W) x 601.29 mm (D)[1] |
| Communications Interface | — | RS-232, Analog, Ethernet, DeviceNet, Profibus[3] |
| Physical Dimensions (1.5/3/5.5 kW) | — | 132.59 mm H x 215.14 mm W x 425.96 mm D[1] |
| Physical Dimensions (10 kW) | — | 133.35 mm H x 482.6 mm W x 601.29 mm D[1] |
| Mounting options | — | On-board chamber mount, on-tool frame mount, rack mount, shoebox options[3] |
| Regulatory compliance | — | CE marked; complies with EN50178, EN50091-2, EN50082-2, FCC Part 18, SEMI S2, F47; most models also comply with UL1012 and CSA 107.1[1] |
| RF Output Frequency | — | 13.56 MHz[1] |
| Forward Power Regulation Accuracy | — | +/-1% of set point or +/-0.1% full-rated output power (whichever greater) into 50 Ohm non-reactive load[1] |