Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer TMU 064 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TMU 064 TurbomolecularPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer TMU 064 |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | TMU 064[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | With TCP015 Controller[3] |
| Equipment type | — | Turbomolecular pump[1] |
| Make | — | Pfeiffer[3] |
| Controller | — | TCP015 controller[3] |
| Pumping speed for N2 | — | 53 l/s[1] |
| Pumping speed for He | — | 42 l/s[1] |
| Pumping speed for H2 | — | 31 l/s[1] |
| Nominal rotation speed | — | 90,000 l/min[1] |
| Standby rotation speed | — | 60,000 l/min[1] |
| Run-up time | — | 2.5 min (up to 90% rated rotation speed)[1] |
| Noise level | — | < 50 dB(A)[1] |
| Final pressure, backing pump | — | ≤ 5 mbar[1] |
| Inlet | — | DN 63 ISO-KF / DN 63 CF-F[1] |
| Outlet | — | DN 16 ISO-KF / G 1/4"[1] |
| Venting connection | — | G 1/8"[1] |
| Maximum permissible rotor temperature | — | 90°C[1] |
| Permissible heat radiation power | — | 4 W[1] |
| Maximum fore-vacuum pressure for N2 | — | 14 mbar[1] |
| Maximum fore-vacuum pressure for He | — | 10 mbar[1] |
| Maximum fore-vacuum pressure for H2 | — | 6 mbar[1] |
| Maximum gas throughput for N2 | — | 1.1 mbar[1] |
| Maximum gas throughput for He | — | 1.5 mbar[1] |
| Maximum gas throughput for H2 | — | 1 mbar[1] |
| Final pressure with diaphragm vacuum pump | — | < 1 x 10^-8 mbar[1] |
| Final pressure with rotary vane vacuum pump | — | < 2 x 10^-10 mbar[1] |
| Lubricant | — | TL 011[1] |
| Cooling type | — | standard convection[1] |
| Cooling water consumption | — | 15 l/h with water at 15°C[1] |
| Cooling water temperature | — | 5-25°C[1] |
| Permissible ambient temperature with air cooling | — | 0-35°C[1] |
| Heating power consumption | — | 40 W[1] |
| Weight | — | 3.6 / 3.8 kg[1] |
| Permissible magnetic field | — | 4 mT[1] |