Comparison ledger
ABM -407B-1-S-CES293 Robot, Ulvac Heliot 700 Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Ulvac |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Ulvac Heliot 700 Helium Leak Detector |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | Heliot 700[4] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Manufacturer | — | ULVAC (Japan)[3] |
| Type / model designation | — | 701[1] |
| Sensitivity (super fine leak flow setting) | — | 10⁻¹³ Pa·m3/s[3] |
| Sensitivity (fine leak flow setting) | — | 10⁻¹¹ Pa·m3/s[3] |
| Main pump | — | 25 L/s compound molecular pump[3] |
| Fore pump | — | Oil rotary pump / Scroll pump / Membrane pump[3] |
| Power supply options | — | AC100V, AC200V[3] |
| Line input (unit) | — | AC115V, 50/60Hz, 1.0 kVA[1] |
| Test port | — | NW25[3] |
| Warm-up time | — | 3 min (quick start setting)[3] |
| Shutdown time | — | 3 min[3] |
| Test screen | — | Graph, meter and value / color touch panel[3] |
| Mass | — | 43.0 kg[1] |