Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards IQDP 40, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IQDP 40Edwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards IQDP 40 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Typical peak pumping speed (50 Hz) | — | 44 m³ h⁻¹[3] |
| Typical peak pumping speed (60 Hz) | — | 55 m³ h⁻¹[3] |
| Displacement (swept volume) at 50 Hz | — | 52.0 m³ h⁻¹[3] |
| Displacement (swept volume) at 60 Hz | — | 62.4 m³ h⁻¹[3] |
| Ultimate vacuum (with shaft-seals purge, 50 Hz) | — | 5 × 10⁻² mbar[3] |
| Mass (pump only) | — | 186 kg[3] |
| Motor power | — | 2.2 kW[1] |
| Noise level | — | < 70 dB(A)[3] |
| Inlet connection | — | ISO40 bolted[4] |
| Exhaust connection | — | KF40[4] |
| Electrical supply | — | 3-phase, 208-230/380-415 V, 50/60 Hz[4] |