Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Pfeiffer ADS 602 H, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ADS 602 HPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Pfeiffer ADS 602 H |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Type | — | Multistage Roots dry pump[3] |
| Ultimate Pressure (60 Hz) | — | 5×10⁻⁴ mbar[1] |
| Ultimate Pressure (50 Hz) | — | 8×10⁻⁴ mbar[1] |
| Nominal Flow Rate (50 Hz, without converter) | — | 480 m³/h[1] |
| Nominal Flow Rate (60 Hz, without converter) | — | 560 m³/h[1] |
| Nominal Power | — | 3 kW[1] |
| Supply Voltage | — | 3 Ph 200/480 V[1] |
| Max Continuous Inlet Pressure | — | 10 mbar[1] |
| N2 Purge Flow Rate | — | 0 to 50 sl/mn[1] |
| Cooling Water Flow Rate | — | 60 l/h[1] |
| Cooling Water Input Temperature Range | — | +10°C to +35°C[3] |
| Rotation Speed | — | 3000 to 3600 rpm[1] |
| Ambient Temperature Range | — | 5 to 40°C[1] |
| Inlet Port | — | DN 100 ISO-K[1] |
| Exhaust Port | — | DN 40 ISO-KF[1] |
| Weight | — | 400 kg[1] |