Comparison ledger
ABM -407B-2-S-CE-S293 Robot, SUSS MicroTec AS 8 Alta Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AS 8 Alta SpraySUSS MicroTec | |
|---|---|---|
| OEM | ABM | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | SUSS MicroTec AS 8 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | With:[2] |
| Tool type | — | Manual spray coater for high topographies[3] |
| Substrate size | — | Up to 200 mm and square substrates up to 6 inch edge length[3] |
| Wafer sizes | — | 3, 4, 5, 6, 8 inch[2] |
| Spray coater description | — | Spray coater for 3-inch to 8-inch wafers[4] |
| Maximum substrate size | — | 8 inch[5] |
| Resist spray dispense system | — | High precision resist spray dispense system up to 30 CPS, Resist type[2] |
| Pre-wet dispense nozzle | — | Altaspray, bowl clean solvent type[2] |
| Pressure tank system | — | 10 L SS with coupling[2] |
| Substrate assembly | — | R6 Altaspray BSR ready[2] |
| Resist storage | — | Stainless steel (x2)[2] |
| Media storage | — | SS EX[2] |
| Waste canister | — | 10 L stainless steel[2] |
| Transformer | — | For manual tool[2] |
| Vintage | — | 2018[2] |
| Spray axis velocity | — | Up to 500 mm/s[3] |
| Acceleration | — | Up to 9 m/s²[3] |
| Z-axis adjustment range | — | Up to 45 mm[3] |
| Nozzle adjustment range | — | 67.5 mm to 107.5 mm[3] |
| Chuck rotation | — | Up to 1,000 rpm[3] |
| Nozzles | — | Dual spray nozzles and separate solvent nozzle[3] |
| Filter unit | — | Solvent[2] |
| Maximum rotation speed | — | Up to 1,000 rpm[3] |
| Manual | — | 2018[2] |