Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Thermotron SE 600 10 10 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SE 600 10 10 EnvironmentalThermotron | |
|---|---|---|
| OEM | ABM | Thermotron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Thermotron SE 600 10 10 Environmental |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Workspace dimensions (WxDxH) | — | 40 x 26.25 x 34 inches (102 x 67 x 86 centimeters)[2] |
| Workspace volume | — | 20.7 ft³ (586 L)[2] |
| Temperature uniformity | — | ±0.5°C (±0.9°F)[2] |
| Temperature range | — | -70°C to 180°C (-94°F to 356°F)[2] |
| Temperature control tolerance | — | 0.3°C (0.5°F)[2] |
| Approx. shipping weight | — | 2,040 lbs (925 kg)[2] |
| Move-in dimensions (WxDxH) | — | 49 x 70 x 83 inches (124 x 178 x 211 centimeters)[2] |
| Inlet water at 24°C / 75°F | — | 9 gal/min (34 L/min)[2] |
| Inlet water at 18°C / 65°F | — | 7.5 gal/min (28 L/min)[2] |
| Inlet water at 13°C / 55°F | — | 6 gal/min (23 L/min)[2] |
| Inlet water at 29°C / 85°F | — | 16 gal/min (60 L/min)[2] |
| Humidity range | — | 10 to 98% RH[2] |
| Humidity control | — | +/- 2.5% RH[2] |
| Heating performance from -65°C to 71°C | — | 9 minutes[2] |
| Heating performance from -65°C to 180°C | — | 19 minutes[2] |
| Heating performance from -40°C to 85°C | — | 8 minutes[2] |
| Heating rate from -65°C to 71°C | — | 15.1°C/minute[2] |
| Heating rate from -65°C to 180°C | — | 12.8°C/minute[2] |
| Heating rate from -40°C to 85°C | — | 15.6°C/minute[2] |
| Electrical requirements at 460 / 3 / 60 | — | 41 full load amps[2] |
| Electrical requirements at 400 / 3 / 50 | — | 42 full load amps[2] |
| Electrical requirements at 230 / 3 / 60 | — | 81 full load amps[2] |
| Electrical requirements at 208 / 3 / 60 | — | 89 full load amps[2] |
| Cooling performance from 85°C to -40°C | — | 11 minutes[2] |
| Cooling performance from 71°C to -65°C | — | 17 minutes[2] |
| Cooling performance from 180°C to -65°C | — | 28 minutes[2] |
| Cooling rate from 85°C to -40°C | — | 11.3°C/minute[2] |
| Cooling rate from 71°C to -65°C | — | 8°C/minute[2] |
| Cooling rate from 180°C to -65°C | — | 8.7°C/minute[2] |
| Airflow | — | 1,000 CFM[2] |
| Workspace dimensions | — | 40" wide x 26.25" deep x 34" high (102 cm wide x 67 cm deep x 86 cm high)[3] |
| Heated window | — | 15" wide x 19" high (38 cm wide x 48 cm high)[3] |
| Compressors | — | Two 10 horsepower scroll compressors in cascade[3] |
| Chamber heater | — | 16KW[3] |
| Circulator motor | — | One 1/2 horsepower, 1725 RPM[3] |
| Shipping weight | — | Approximately 1700 pounds (771 kg)[3] |
| Construction material | — | Internal liner: 18 gauge, series 300 stainless steel; exterior: die-formed 16 gauge treated sheet steel[3] |
| Electrical power | — | 230 volt (±5%), 3 phase, 60 cycle; recommended minimum service 90 amps, or 460 volt (±5%), 3 phase, 60 cycle; recommended minimum service 50 amps[3] |
| Cooling water at 85°F inlet temperature | — | 16 GPM[3] |
| Cooling water at 75°F inlet temperature | — | 9 GPM[3] |
| Cooling water at 65°F inlet temperature | — | 6 GPM[3] |
| Minimum pressure | — | 30 PSI[3] |
| Maximum pressure | — | 125 PSI[3] |