Waferpedia

Comparison ledger

APM 90versus, TPS JR-A-F4T Junior compact temperature test chambers

Accretech APM 90, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
APM 90Accretech
OEMAccretechTenney
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech APM 90Tenney , TPS JR-A-F4T Junior compact temperature test chambers
Specifications
ConfigurationNickle Chuck[1]—
Temp range25-150 grad[1]—
MissingJoystick, Display, HDD, Cleaning Unit Ceramic[2]—
Wafer Sizes6, 8 inch[1]—
Chuck MaterialNickel[1]—
Temperature Range25-150 °C[1]-68°C to +180°C[4]
Loader TypeSingle loader[1]—
Chuck Planarity~19 µm[1]—
Equipment typeProber[1]—
Wafer sizes6 inch, 8 inch[1]—
ChuckNickle Chuck[1]—
Temperature range25-150 grad[1]—
LoaderSingle loader[1]—
OCRIncludes OCR[3]—
Vintage1995, 1996, 1997[2]—
Chamber Size—1.2 cubic feet[4]
Control—+/-1.0°C[4]
Manufacturer—Tenney[4]
Model—JR-A-F4T[4]
Short description—Junior compact temperature test chambers[4]
Control accuracy—+/-1.0°C[4]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]dealer listingwotol.com