Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, Lam Research TCP9400DFM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | TCP9400DFMLam Research |
|---|---|---|
| OEM | Accretech | Lam Research |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | Lam Research TCP9400DFM |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Dry | — | Poly Etcher[2] |
| Manufacturer | — | Lam Research (listed as LAM / Lam)[3] |
| Model / Part No. | — | TCP9400DFM[2] |
| Equipment type | — | Dry poly etcher[2] |
| Process | — | Poly etch[3] |