Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, SUSS MicroTec LabSpin6 / 8, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | LabSpin6 / 8SUSS MicroTec |
|---|---|---|
| OEM | Accretech | SUSS MicroTec |
| Category | — | — |
| Wafer size | Wafer Equipment | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | SUSS MicroTec LabSpin6 / 8 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | — |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Substrate Size | — | up to 200 mm[2] |
| Process Capability | — | Spin coating, Puddle developing[2] |
| Operation Type | — | Manual[2] |