Waferpedia

Comparison ledger

PDX 5000versus0010-03254 E Chuck

Advanced Energy PDX 5000, Applied Materials 0010-03254 E Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
PDX 5000Advanced Energy
0010-03254 E ChuckApplied Materials
OEMAdvanced EnergyApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAdvanced Energy PDX—
Specifications
M/N3156043-204 D[1]—
TypeRF generator[2]—
Output power5000 W[3]—
Frequency330-460 kHz[3]—
Model numberM/N: 3156043-205[3]—
Part numberP/N: 27-262734-00[3]—
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]seikigt.com.sgseikigt.com.sg
  3. [3]power19.compower19.com
  4. [4]semistarcorp.comsemistarcorp.com