Waferpedia

Comparison ledger

RFG 1250 Haloversus0010-03254 E Chuck

Advanced Energy RFG 1250 Halo, Applied Materials 0010-03254 E Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
RFG 1250 HaloAdvanced Energy
0010-03254 E ChuckApplied Materials
OEMAdvanced EnergyApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAdvanced Energy RFG—
Specifications
ConfigurationRefurbished[1]—
ManufacturerAdvanced Energy[2]—
ModelRFG 1250 Halo[2]—
Model number3155027-028[3]—
Output powerup to 1200W / 1.2kW[3]—
Frequency modefixed frequency or variable frequency[3]—
Used onLAM Etchers among others[4]—
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]palrepair.compalrepair.com
  4. [4]semistarcorp.comsemistarcorp.com