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0010-03254 E ChuckversusECT 3 Temperature

Applied Materials 0010-03254 E Chuck, ESPEC ECT 3 Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsESPEC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESPEC ECT 3 Temperature
Specifications
Voltage—115V[1]
Full Load Amp—18[2]
Configuration—Unit adjusts to set temperatures as specified to Watlow F4 Controller[2]
Controller—Watlow F4 Controller[1]
Overtemp protection—Overtemp protectors engage properly at set temperatures[2]
Vintage—2005[2]
Type—Temperature chamber[1]
Full load amp—18 A[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing