Waferpedia

Comparison ledger

0010-03254 E ChuckversusIML 6 1 Ion Mill

Applied Materials 0010-03254 E Chuck, Hitachi IML 6 1 Ion Mill, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsHitachi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Hitachi IML 6 1 Ion Mill
Specifications
Configuration—With:[1]
OEM—Hitachi[1]
Model—IML 6 1[1]
Equipment type—Ion mill[1]
Wafer size—6 inch[1]
Power—DC Volt Generator[2]
Vacuum & pumping—Kashyama CH 60 Dry Pump[2]
Configuration & options—CH-4014 Circulator; Spare Parts[2]
Vintage—1997[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com