Comparison ledger
Applied Materials 0010-03254 E Chuck, Leybold D 65 BCS Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | D 65 BCS VacuumLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Leybold D 65 BCS Vacuum |
| Cited variants | — |
|
| Specifications | ||
| Oil Type | — | Fomblin[2] |
| Voltage | — | 230 Vac, 3 Phase[2] |
| Volume Flow Rate | — | 65[3] |
| Configuration | — | Ultimate Pressure < 8x10 -4[3] |
| Manufacturer | — | Leybold[2] |
| Model | — | D 65 BCS[2] |
| Equipment type | — | Vacuum pump[2] |
| Pump family | — | TRIVAC BCS[4] |
| Pump type | — | Oil-sealed rotary vane vacuum pump[1] |
| Stages | — | Two-stage[1] |
| Nominal pumping speed | — | 65 m3/h[1] |
| Pumping speed | — | 65 cfm[5] |
| Ultimate total pressure | — | < 8 x 10^-4 Torr[4] |
| Power | — | 230 Vac, 3 Phase[2] |
| Connection | — | 40 KF[1] |