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0010-03254 E ChuckversusD 35614 Asslar Dry Vacuum

Applied Materials 0010-03254 E Chuck, Pfeiffer D 35614 Asslar Dry Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
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Family—Pfeiffer D 35614 Asslar Dry Vacuum
Specifications
Flow—83 m³/h[1]
Phase—3-phase 208 V (+20%/-10%) – 6 A[1]
Frequency—50/60 Hz[1]
Oil—F5 (Pfeiffer recommended lubricant)[1]
Configuration—Needs refurbishing[1]
Type—dry vacuum pump[2]
Electrical—3-phase 208 V (+20%/-10%) – 6 A[1]
Lubricant—F5 (Pfeiffer recommended lubricant)[1]
Condition—Needs refurbishing[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com