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0010-03254 E ChuckversusEquinox Semiconductor Wafer Electroplating

Applied Materials 0010-03254 E Chuck, Semitool Equinox Semiconductor Wafer Electroplating, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
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Family—Semitool Equinox
Specifications
Configuration—Single head, manual plater with one process head (100mm) and one SRD (100mm)[1]
Voltage—208V, 3 Ph, 50/60 Hz, 40A[1]
Manufacturer—Semitool[1]
Model—Equinox Semiconductor Wafer Electroplating System[1]
Process head—One process head (100mm)[1]
SRD—One SRD (100mm)[1]
Anode—Titanium anode[1]
Reactor type—Electroplating cup reactors for uniform films[1]
Load system—Simple manual load system[1]
Chambers—Two chambers[1]
Power—208V, 3 Ph, 50/60 Hz, 40A[1]
Control—Computer powers on[1]
Condition note—Appears to have residual gold plating solution in the lines[1]
Tool type—Single-head manual plater[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com