Waferpedia

Comparison ledger

0010-13627 High Efficiency RF Matchversus250 Blower

Applied Materials 0010-13627 High Efficiency RF Match, Edwards 250 Blower, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
250 BlowerEdwards
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchEdwards 250 Blower
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]250[4]
Type of product—blower[3]
Manufacturer—Edwards[4]
Inlet—ISO63[3]
Exhaust—KF40[3]
Motor—3 Phase, 208-230/460V, 60Hz[3]
Oil—PFPE[3]
Pumping speed—141 CFM (with E2M40)[3]
Weight—134 lbs[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]provac.comprovac.com
  4. [4]Equipment inventory listing
  5. [5]jmind.comjmind.com