Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Edwards EPX 500 NE Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | EPX 500 NE DryEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Edwards EPX |
| Specifications | ||
| Configuration | HE, BIAS[1] | 200/208 Volts[3] |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | — |
| OEM | Applied Materials[2] | Edwards[4] |
| Model | 0010-13627[2] | EPX 500 NE[4] |
| Equipment type | — | Dry pump[4] |
| Electrical | — | 200/208 volts[3] |
| Frequency | — | 50/60 Hz[4] |
| Current | — | 16 amps[4] |
| Power | — | 200/208 Volts[4] |
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