Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Edwards IXH 1210, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | IXH 1210Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Edwards IXH |
| Specifications | ||
| Configuration | HE, BIAS[1] | 50/60 Hz[3] |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | NRY 4 JC 000 XS[3] |
| OEM | Applied Materials[2] | — |
| Model | 0010-13627[2] | IXH 1210[3] |
| Input | — | 3-200-230V[3] |
| Manufacturer | — | Edwards[3] |
| Inlet | — | ISO100[4] |
| Exhaust | — | KF40[4] |
| Pumping speed | — | 603.29 CFM[4] |
| Ultimate pressure | — | 3.7 x 10-3 Torr[4] |
| Weight | — | 948 lbs[4] |
| Dry pump size | — | 100 m3/h[5] |
| Peak speed | — | 1025 m3/h[5] |
| System power at ult | — | 3.2 kW[5] |
| Typical water flow | — | 4.2 l/m[5] |
| Inlet connection | — | ISO 100[5] |
| Outlet connection | — | NW 40[5] |
| Purge flow range | — | 28/44* /60 slm[5] |
| Condition | — | new[3] |
| Vintage | — | 2016[3] |
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