Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Edwards IXH 610, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | IXH 610Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Edwards IXH |
| Specifications | ||
| Configuration | HE, BIAS[1] | Fully refurbished[3] |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | dry vacuum pump[4] |
| OEM | Applied Materials[2] | — |
| Model | 0010-13627[2] | — |
| Application | — | harsh chemical applications[4] |
| Input power | — | 1.3 kW[4] |
| Peak pumping speed | — | 665 m3/h (391 CFM)[4] |
| Ultimate pressure | — | 3.7 x 10-3 Torr[4] |
| Inlet connection | — | ISO100[5] |
| Exhaust connection | — | KF40[5] |
| Weight | — | 782 lbs[5] |
| System power at ultimate | — | 2.6 kW[6] |
| Typical water flow | — | 3 l/m[6] |
| Purge flow range | — | 22/44 slm[6] |
| Dry pump size | — | 100 m3/h[6] |
| Booster size | — | 600 m3/h[6] |
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