Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusnXDS 10 i Dry Scroll

Applied Materials 0010-13627 High Efficiency RF Match, Edwards nXDS 10 i Dry Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchEdwards nXDS 10
Specifications
ConfigurationHE, BIAS[1]100-127V~10A[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]Dry Scroll Pump[5]
OEMApplied Materials[2]—
Model0010-13627[2]—
Voltage—100-127V~ / 200-240V~[3]
Current—10A at 100-127V~ / 6A at 200-240V~[3]
Frequency—50/60 Hz[3]
Voltage (Low Range)—100-127V~10A[3]
Voltage (High Range)—200-240V~6A[3]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing