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0010-13627 High Efficiency RF MatchversusPorta 300 Load Port

Applied Materials 0010-13627 High Efficiency RF Match, Genmark Porta 300 Load Port, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsGenmark
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchGenmark Porta 300 Load Port
Cited variants—
  • Porta300™ plus Load Port[1]
Specifications
ConfigurationHE, BIAS[2]—
Asset Number70430[3]—
TypeHigh Efficiency RF Match - HE, BIAS[3]—
OEMApplied Materials[3]—
Model0010-13627[3]Porta 300[4]
Make—Genmark[4]
Substrate Size—150 mm, 200 mm, 300 mm[1]
Carrier Types—FOUP, FOSB, 25 wafers; 150 mm and 200 mm cassettes when using open cassette adapter[1]
Carrier ID reader/writer—IR, RF, Barcode[1]
Standards compliance—SEMI E15.1, E1.9, E10, E47.1, E57, E63, E64, E72, E83, E84, E110, M31, S2, S8[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nidecgenmark.comnidecgenmark.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing