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0010-13627 High Efficiency RF MatchversusOmniMap RS 75 Resistivity Mapper

Applied Materials 0010-13627 High Efficiency RF Match, KLA OmniMap RS 75 Resistivity Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryLab & Support EquipmentMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchKLA OmniMap
Specifications
ConfigurationHE, BIAS[1]120 Volts[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]KLA[3]
Model0010-13627[2]OmniMap RS 75[3]
Equipment type—Resistivity Mapper[4]
Electrical specification—120 Volts, 50/60 Hz[3]
Vintage—1999[5]
Parts machine—Yes[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]Equipment inventory listing