Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusWH 7000 Vacuum

Applied Materials 0010-13627 High Efficiency RF Match, Leybold WH 7000 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLeybold
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchLeybold WH 7000 Vacuum
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]vacuum pump[3]
OEMApplied Materials[2]—
Model0010-13627[2]WH 7000[3]
Power—11kW, LVO 210[3]
Make—Leybold[3]
Fluid—LVO 210[3]
Technology—Roots pumps[4]
Control—controlled by a frequency converter[4]
Pumping speed—7000 - 8900 m3/h[4]
Max. pressure difference—11.30 mbar[4]
Connection—ISO-K 100[4]
RPM—4700 - 7800[4]
Weight—650 kg[4]
Size—1435 x 540 x 420 mm[4]
Family—RUVAC WH 7000[5]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]vakuum-bohemia.czvakuum-bohemia.cz
  5. [5]shop.leyboldus.comshop.leyboldus.com