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0010-13627 High Efficiency RF MatchversusHX 150 Chiller

Applied Materials 0010-13627 High Efficiency RF Match, Neslab HX 150 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab HX 150
Specifications
ConfigurationHE, BIAS[1]Cool Flow Refrigerated Recirculator[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]Cool Flow Refrigerated Recirculator[6]
OEMApplied Materials[2]—
Model0010-13627[2]HX 150[5]
Voltage—208V - 14 Amps - Single phase 3 wire[3]
Make—Neslab[5]
Refrigerant—R-22 (some units), R427A (other units)[3]
Pump type—TU-1[3]
Current—14 Amps[3]
Phase—Single phase[3]
Refrigerant configuration—Set up for R-22 or R427A[4]
Condition (example units)—Tested in working condition[3]
Manufacturer—Neslab[6]
Power requirement—208V, 14 Amps, single phase[3]
Temperature range—+5°C to +35°C[7]
Temperature stability—±0.1°C[7]
Reservoir volume—8/30.3 gallons/liters[7]
Dimensions (H x W x D)—39 5/8 x 26 1/4 x 21 1/8 in; 100.6 x 66.7 x 53.7 cm[7]
Shipping weight—320 lbs / 145.2 kgs[7]
Cooling capacity at 20°C, 60 Hz—4,500 W[7]
Cooling capacity at 20°C, 50 Hz—3,735 W[7]
Power requirements, 60 Hz—208-230V, 60 Hz, 17 Amps[7]
Power requirements, 50 Hz—220-240V, 50 Hz, 14 Amps[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]waferpedia.comwaferpedia.com
  7. [7]chillercity.comchillercity.com