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0010-13627 High Efficiency RF MatchversusHX 500 Chiller

Applied Materials 0010-13627 High Efficiency RF Match, Neslab HX 500 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab HX 500 Chiller
Specifications
ConfigurationHE, BIAS[1]440-480V[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]HX 500[3]
Pump Type—CP-55[3]
Controller—Digital, non bath[3]
Frequency—60Hz[3]
Phase—3 Phase[3]
Refrigerant—R-22[3]
Make—Neslab[3]
Power—440-480V[3]
Temperature range—5°C to 35°C[4]
Stability—± 0.1°C[4]
Condenser—air or water cooled[4]
Reservoir size—28 gallons / 106 liters[4]
Cooling capacity at 60 Hz and 20°C—15,700 watts[4]
Cooling capacity at 50 Hz and 20°C—13,030 watts[4]
Pump performance at 60 Hz, Pump 1—23 gpm at 50 psig (TU 9)[4]
Pump performance at 60 Hz, Pump 2—19 gpm at 50 psig (CP 75)[4]
Pump performance at 50 Hz, Pump 1—16 gpm at 50 psig (TU 9)[4]
Pump performance at 50 Hz, Pump 2—10 gpm at 40 psig (CP 75)[4]
Power requirements at 60 Hz—208-230V 3ø / 460V 3ø[4]
Power requirements at 50 Hz—380-415V 3ø[4]
Unit dimensions (H x W x D)—51.625 x 46 x 28.75 in / 131.1 x 116.8 x 73 cm[4]
Plumbing connections, inlet/outlet process—1 in. FNPT[4]
Plumbing connections, inlet/outlet facility—1 in. FNPT[4]
Plumbing connection, drain—1/2 in. FNPT[4]
Plumbing connection, auto refill—3/8 in. OD SS barb[4]
Unit weight—746 lb / 338.4 kg[4]
Applications—Lasers, process cooling, MRI, medical lasers, linear accelerators, diffusion pumps, vacuum systems, plasma etch equipment[5]
Equipment type—Environmental[6]
Cooling type—Water cooled chiller[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]industrial-stores.comindustrial-stores.com
  5. [5]chillercity.comchillercity.com
  6. [6]jmind.comjmind.com
  7. [7]waferpedia.comwaferpedia.com