Waferpedia

Comparison ledger

0010-13627 High Efficiency RF MatchversusSteelhead 1 Heat Exchanger

Applied Materials 0010-13627 High Efficiency RF Match, Neslab Steelhead 1 Heat Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab Steelhead 1 Heat Exchanger
Specifications
ConfigurationHE, BIAS[1]Heater 6KW, 3hp Pump[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]—
Phase—200/208V, 3 Phase, 4-Wire[3]
Power—200/208V, 3 Phase, 4-Wire[3]
Heater—6KW[3]
Pump—3hp[3]
Full load—25A[3]
Status—Unit powers on and completes systems check sequence successfully[3]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing