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0010-13627 High Efficiency RF MatchversusAlcatel 2012 A Rotary

Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer Alcatel 2012 A Rotary, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchPfeiffer Alcatel
Specifications
ConfigurationHE, BIAS[1]60/50 Hz[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]rotary pump[4]
OEMApplied Materials[2]—
Model0010-13627[2]—
RPM—1725/1425[3]
Frequency—60/50 Hz[3]
Motor power—HP 3/4[3]
Speed—RPM: 1725/1425[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]fab-spares.comfab-spares.com