Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer Alcatel 2033 Rotary Vane, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | Alcatel 2033 Rotary VanePfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer Alcatel |
| Cited variants | — | |
| Specifications | ||
| Configuration | HE, BIAS[2] | Serviced with Alcatel TA101 Thermocouple[4] |
| Asset Number | 70430[3] | — |
| Type | High Efficiency RF Match - HE, BIAS[3] | Mechanical forepumps[1] |
| OEM | Applied Materials[3] | Pfeiffer / Alcatel[4] |
| Model | 0010-13627[3] | 2033[4] |
| Make | — | Pfeiffer / Alcatel[4] |
| Description | — | Rotary vane pump[4] |
| Number of stages | — | 2[5] |
| Nominal rotational speed | — | 1,500 rpm[5] |
| Nominal pumping speed | — | 30 m3/h (23.3 cfm) at 50Hz[5] |
| Pneurop pumping speed | — | 27 m3/h (18.8 cfm) at 50Hz[5] |
| Ultimate partial pressure | — | 2 x 10^-4 mbar[5] |
| Ultimate total pressure open gas ballast | — | 2 x 10^-2 mbar[5] |
| Oil capacity | — | 3.6 liters[5] |
| Weight | — | 61 kg (134 lbs)[5] |
| Inlet and outlet flanges | — | ISO-KF DN 40[5] |
| Serviced with | — | Alcatel TA101 Thermocouple[4] |
| Gas ballast | — | Manual gas ballast[5] |
| Category | — | Vacuum pump / vacuum forepump[1] |
| Stages | — | 2[1] |
| Free air displacement | — | 35 m3/h at 50 Hz; 65 m3/h at 60 Hz[1] |
| Air displacement (Pneurop method) | — | 30 m3/h at 50 Hz; 60 m3/h at 60 Hz[1] |
| Base pressure without gas ballast | — | < 1.10-4 mbar at 50 Hz; < 2.10-4 mbar at 60 Hz[1] |
| Base pressure with gas ballast | — | < 5.10-3 mbar[1] |
| Maximum permissible water vapor pressure | — | 30 mbar at 50 Hz; 25 mbar at 60 Hz[1] |
| Inlet and outlet | — | NW 40 Pneurop nipples[1] |
| Manual gas ballast accessory part number | — | 068391[1] |
| Oil mist eliminator accessory part number | — | 068442[1] |
| Dust filter accessory part number | — | 068480[1] |
| Liquid nitrogen trap accessory part number | — | 786537[1] |
| Pump type | — | Mechanical forepump[1] |
| Frequency | — | 50 Hz / 60 Hz[1] |
| Application | — | Neutral or normal atmosphere gases[1] |
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