Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer Alcatel Drytel 31 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | Alcatel Drytel 31 VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer Alcatel |
| Specifications | ||
| Configuration | HE, BIAS[1] | Working but needs to be rebuilt (kit provided)[3] |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | — |
| OEM | Applied Materials[2] | — |
| Model | 0010-13627[2] | — |
| Pump type | — | Oil-free turbo drag high vacuum pumping system[4] |
| Pump configuration | — | Turbo drag pump backed by diaphragm pump[5] |
| Inlet flange | — | DN 63 ISO-K[5] |
| Exhaust flange | — | DN 16 ISO-KF[6] |
| Pumping speed | — | 7.5 l/s[5] |
| Ultimate pressure | — | 1 x 10^-6 Torr[5] |
| Operating voltage | — | 115 VAC / 60 Hz[5] |
| Air cooling | — | Fully air cooled with an internal cooling fan[5] |
| Operating range | — | From atmosphere to 5x10-6 mbar[5] |
| Maximum chamber size | — | Up to 50 liters[7] |
| Maximum pumping speed in high vacuum range | — | 16 cfm[7] |
| Primary turbo drag pump | — | MDP-5011[5] |
| Primary turbo drag pump inlet flange | — | DN-63-ISO[5] |
| Rotation speed | — | 27,000 rpm[7] |
| Backing pump | — | 1 m^3/hr diaphragm pump[7] |
| Maximum flow rate | — | 400 sccm[6] |
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