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0010-13627 High Efficiency RF MatchversusDCU 600 Turbo Pump Controller

Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer DCU 600 Turbo Pump Controller, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchPfeiffer DCU
Cited variants—
  • DCU-600 Turbo Pump Controller, Rebuilt[1]
Specifications
ConfigurationHE, BIAS[2]Input:[4]
Asset Number70430[3]—
TypeHigh Efficiency RF Match - HE, BIAS[3]—
OEMApplied Materials[3]—
Model0010-13627[3]—
Voltage—140 V - 3.4 A[4]
Power—480 W / 4.3 A[4]
Input voltage (new configuration)—90-184 V AC or 185-265 V AC[5]
Input power (new configuration)—800 VA[5]
Input voltage (rebuilt configuration)—100-120 V AC or 208-230 V AC[1]
Input power (rebuilt configuration)—800 VA[1]
Input voltage (Fab Spares listing)—90-184 V AC or 185-265 V AC[6]
Input power (Fab Spares listing)—660 VA[6]
Output voltage—140 V[6]
Output current—3.4 A or 4.3 A[6]
Output power—480 W or 600 W[6]
Weight—6 lbs[5]
Frequency—50/60 Hz[5]
Type of product—controller[5]
Manufacturer—Pfeiffer[5]
Part number (new)—PMC01697BA[5]
Part number (rebuilt)—PMC01697B[1]
Input—100-120 V ~ / 208-240 V ~ ±10%, 50/60 Hz[7]
Output—140 V ±3%, 480/750 W, 3.4/5.4 A[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]provac.comprovac.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]provac.comprovac.com
  6. [6]fab-spares.comfab-spares.com
  7. [7]inventory listing