Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer TPH 170 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | TPH 170 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer TPH |
| Specifications | ||
| Configuration | HE, BIAS[1] | Humming sound when running[3] |
| Asset Number | 70430[2] | — |
| Type | High Efficiency RF Match - HE, BIAS[2] | — |
| OEM | Applied Materials[2] | Pfeiffer Vacuum / Balzers[4] |
| Model | 0010-13627[2] | TPH 170[4] |
| Volume flow rate | — | 170[3] |
| Voltage | — | 110V[3] |
| Pumping speed (N2) | — | 170 L/s[4] |
| Inlet port flange | — | DN 100 ISO-K (Claw clamp)[4] |
| Exhaust/foreline port | — | DN 25 ISO-KF[4] |
| Vent port | — | DN 10 ISO-KF[4] |
| Cooling method | — | Water cooling standard / Convertible to forced air[4] |
| Recommended controllers | — | Pfeiffer TCP 121, TCP 300, TCP 310, TCS 302[4] |
| Recommended backing pump | — | Uno/Duo 004B, Duo 016B, or equivalent 2-stage rotary vane pump[4] |
| Weight | — | ~7.25 kg (16 lbs)[4] |
| Part number | — | PM P01 210 / PMP01210A[4] |
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