Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer TPU 060 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | TPU 060 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer TPU |
| Cited variants | — |
|
| Specifications | ||
| Configuration | HE, BIAS[2] | — |
| Asset Number | 70430[3] | — |
| Type | High Efficiency RF Match - HE, BIAS[3] | Turbomolecular high vacuum system[5] |
| OEM | Applied Materials[3] | — |
| Model | 0010-13627[3] | TPU 060[1] |
| Mod | — | PM P 01 401[4] |
| Manufacturer | — | Pfeiffer[1] |
| Description | — | Turbomolecular vacuum pump[4] |
| Make | — | Pfeiffer[1] |
| Modification Code | — | PM P 01 401[1] |
Plan your fab
Building a Lab & Support Equipment process? Get a complete equipment list.
Open the fab equipment planner →