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0010-13627 High Efficiency RF MatchversusR 3001

Applied Materials 0010-13627 High Efficiency RF Match, Seren R 3001, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
R 3001Seren
OEMApplied MaterialsSeren
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchSeren R 3001
Specifications
ConfigurationHE, BIAS[1]27.12 Mhz 3 Kw[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]R 3001[3]
Equipment type—RF generator[4]
Frequency—27.12 MHz[3]
Power—3 kW[3]
Make—Seren[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com