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0010-13627 High Efficiency RF MatchversusPTS 300 Leak Checker Scroll

Applied Materials 0010-13627 High Efficiency RF Match, Varian PTS 300 Leak Checker Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchVarian PTS 300 Leak Checker Scroll
Specifications
ConfigurationHE, BIAS[1]Tri-Scroll Vacuum Pump S4700317[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]Varian[3]
Model0010-13627[2]PTS 300[4]
Make—Varian[3]
Equipment type—Leak Checker Scroll Pump[4]
Vacuum—Tri-Scroll Vacuum Pump S4700317[3]
Power—100-115V / 200-230V[4]
Frequency—60/50 Hz[4]
Condition—Rebuilt and in good working condition[3]
Category—Lab & Support Equipment[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com