Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 716 069688 809 ESC Assy, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 716 069688 809 ESC AssyLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 716 069688 809 ESC Assy |
| Cited variants | — | |
| Specifications | ||
| OEM | Applied Materials[3] | Lam[1] |
| Model | 0010-16392[3] | 716 069688 809[1] |
| Type | ESC Assembly[3] | — |
| Wafer Size | 300 mm[4] | — |
| Electrode Configuration | Dual[4] | — |
| Configuration | — | Inner, SI W/ Stud, Socket[1] |
| Product type | — | ESC Assy[1] |
| Variant detail | — | Inner, SI W/ Stud, Socket[1] |
| Manufacturer | — | Lam[1] |
| Assembly designation | — | ESC Assy[1] |
| Description (listing A) | — | Inner, SI W/ Stud, Socket[1] |
| Description (listing B) | — | Inner, SI[2] |
| Product description | — | ESC Assy Inner, SI[2] |
| Asset # | — | 147371[2] |
| Last Confirm Date | — | December 10, 2025[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →