Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Concept Two Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Concept Two SpeedLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Concept Two |
| Cited variants | — |
|
| Specifications | ||
| OEM | Applied Materials[2] | — |
| Model | 0010-16392[2] | Concept Two Speed[4] |
| Type | ESC Assembly[2] | Chamber Only[1] |
| Wafer Size | 300 mm[3] | — |
| Electrode Configuration | Dual[3] | — |
| Configuration | — | 1 Shrink chamber[4] |
| Manufacturer | — | Lam Research[5] |
| Configuration option | — | Shrink chamber[5] |
| Asset # | — | 68566[4] |
| Make | — | Lam / Novellus[4] |
| Process type | — | Etch chamber[1] |
| Platform | — | Novellus Concept Two platform[1] |
| Voltage | — | 208 VAC[1] |
| Phase | — | 3 phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Full load current | — | 21 A[1] |
| Main breaker rating | — | 25 A[1] |
| Largest load | — | 8 A[1] |
| Intended wafer size | — | 8 inch[6] |
| Wafer shape | — | Notch[6] |
| SMIF interface | — | Yes[6] |
| Chamber configuration | — | 1 shrink chamber; 1 standard chamber[4] |
| Largest load current | — | 8 A[1] |
| Interrupt current | — | 10 KA[1] |
| Vintage | — | 2010[1] |
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