Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Rainbow 4420Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Rainbow 4420 |
| Cited variants | — |
|
| Specifications | ||
| OEM | Applied Materials[2] | — |
| Model | 0010-16392[2] | — |
| Type | ESC Assembly[2] | — |
| Wafer Size | 300 mm[3] | — |
| Electrode Configuration | Dual[3] | — |
| Configuration | — | Refurbished[4] |
| Software version | — | Envision 1.5 Release[1] |
| Handler System | — | Harmonics Arm (2)[1] |
| Volts | — | 208[1] |
| Wafer Shape | — | 8" flat zone[5] |
| Process | — | Poly Etch[5] |
| Software | — | Envision 1.5[5] |
| Wafer Aligner | — | Universal[6] |
| Wafer Sizes | — | 8 inch[1] |
| Software Version | — | Envision 1.5[1] |
| CIM SECS | — | Yes[1] |
| Factory Interface | — | SMIF (2)[1] |
| LL Pump | — | Yes[1] |
| TCU 2080 | — | Yes[1] |
| AC Rack | — | Yes[1] |
| PC Pump | — | Yes[1] |
| Vintage | — | 1994[1] |
| Dry Pump | — | Yes[5] |
| Chiller | — | Yes[5] |
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