Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4520 Plasma RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Rainbow 4520 Plasma RIELam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Rainbow 4520 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | Rainbow 4520[4] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | ESC with perimeter pins[3] |
| Without | — | pumps, chillers[3] |
| Manufacturer | — | Lam[4] |
| Tool Type | — | Plasma RIE (Reactive Ion Etcher)[4] |
| Chuck Configuration | — | ESC with perimeter pins[3] |
| Load Locks | — | 2 (entrance and exit)[3] |
| Included Equipment | — | Without pumps, chillers[3] |
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