Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Ulvac NE 5000 N, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | NE 5000 NUlvac |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Ulvac NE 5000 N |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Helium cooling[3] |
| Wafer size | — | 6 inch[3] |
| Cooling | — | Helium cooling[3] |
| Loading/unloading | — | Auto loading & unloading[3] |
| Uniformity | — | +/-3%[3] |
| Gas customization | — | Can customize gas lines based on RFQ[4] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →