Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dimension Fastscan, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Dimension FastscanBruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker Dimension |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Sample size/holder:[3] |
| X-Y scan range | — | 35um x 35um typical / 30um minimum[2] |
| Z range | — | >/= 3um[3] |
| Vertical Noise floor | — | <40pm RMS, sensor in appropriate environment (up to 625Hz)[3] |
| X-Y tip-velocity max (1% tracking error) | — | >2mm/sec[3] |
| Z tip-velocity max | — | 12mm/sec[3] |
| X-Y position noise (closed -loop) | — | =0.20nm RMS typical imaging BW (up to 2.5kHz in adaptive)[3] |
| Z sensor noise level | — | 30pm RMS typical imaging BW (up to 625Hz)[3] |
| X-Y flatness (30um range) | — | =3nm[3] |
| Integral nonlinearily (X-Y-Z) | — | <0.50%[3] |
| Motorized position stage | — | X & Y axis:[3] |
| Instrument type | — | Atomic force microscope (AFM)[3] |
| Model | — | Dimension FastScan[4] |
| Vertical noise floor | — | < 40 pm RMS, sensor in appropriate environment (up to 625 Hz)[3] |
| X-Y tip-velocity max | — | > 2 mm/sec (1% tracking error)[3] |
| X-Y position noise | — | = 0.20 nm RMS typical imaging BW (up to 2.5 kHz in adaptive)[3] |
| X-Y flatness | — | = 3 nm (30 um range)[3] |
| Integral nonlinearity | — | < 0.50% (X-Y-Z)[3] |
| Sample size/holder | — | 210 mm vacuum chuck for samples; <= 210 mm in diameter; <= 15 mm thick[3] |
| Additional sample handling | — | 300 mm vacuum chuck; magnet holder[3] |
| Microscope optics | — | 5 MP digital camera; 130 um to 1040 um viewing area; digital zoom and motorized focus[3] |
| Controller/software | — | NanoScope V / NanoScope v8.15 and later[3] |
| AFM modes | — | Standard, ScanAsyst, Nanomechanical Mapping, TappingMode (air), TappingMode (fluid), PhaseImaging, Contact Mode, Lateral Force Microscopy, Lift Mode, MFM, EFM, Force Spectroscopy, Force Volume[3] |
| Purpose | — | Scanning probe microscopy of various sample types; equipped with FastScan and ICON scanners[2] |
| AFM description | — | Capable of mapping surfaces with nanoscale lateral resolution and sub-nanometer depth resolution[2] |
| Scan rate | — | > 125 Hz when surveying a sample; 1-second per image frame in air or fluid[4] |
| Sample access | — | High scan rates independent of sample size; large sample access[4] |
| Can scan in | — | Air or fluid[4] |
| Controller | — | NanoScope 6 AFM Controller[4] |
| Environment drift rate | — | Less than 200 pm per minute of drift rate over hours[4] |
| Sample holder | — | Open-access platform with large- or multiple-sample holders[4] |
| AFM Modes | — | Standard[3] |
| System Reliability | — | 2%[3] |
| E-Box | — | 03/01/2024[3] |
| Z Scanner | — | 01/03/2024[3] |
| HV Amplifier | — | 01/2024[3] |
| Stage Controller | — | 08/10/2021[3] |
| Nanoscope NS5 Controller | — | 07/28/2020[3] |
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