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0010-22161 High EFF RF Matchversus2200 EVO Tool Holder

Applied Materials 0010-22161 High EFF RF Match, Besi 2200 EVO Tool Holder, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBesi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchBesi 2200 EVO Tool Holder
Cited variants—
  • Datacon 2200 evo advanced[1]
  • Datacon 2200 evo plus[1]
  • Datacon 2200 evo hF[1]
  • Datacon 2200 evo hS[1]
Specifications
MakeApplied Materials[2]Besi / Datacon[4]
Model0010-22161[2]2200 EVO Tool Holder[4]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Asset Number—83809[4]
X/Y Placement Accuracy—±10 µm @ 3σ[5]
Theta Placement Accuracy—±0.15° @ 3σ[5]
Bond Force Range—0.5N to 75N programmable[5]
UPH Die Attach—up to 7,000 UPH/module[5]
UPH Flip Chip with dipping—up to 2,500 UPH/module[5]
UPH Flip Chip without dipping—up to 3,200 UPH/module[5]
Machine Dimensions (LxDxH)—1,160 mm x 1,225 mm x 1,750 mm[5]
Machine Weight—1,300 kg[5]
Uptime—> 98%[5]
Yield—> 99.95%[5]
Die Size (Die Attach)—0.17 mm - 50 mm[5]
Die Size (Flip Chip)—0.5 mm - 50 mm[5]
Die Thickness—>50 µm (thinner on request)[5]
Wafer Size—4" - 12" (SEMI M1)[5]
Frame Size—FF070, FF105, FF108, FF123; automatic change (others on request)[5]
Substrate Working Range—13" x 8" (325 mm x 200 mm)[5]
Bond Head Rotation—0° to 360°[5]
Heated Bond Head (optional)—up to 450°C[5]
UV Curing Wavelengths—365 nm and 405 nm[5]
Product type—Tool holder[4]
Wafer handling—12" wafer handling[5]
Integrated dispenser—Included[5]
Automatic tool changer—Included[5]
Vintage—2010[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]besi.combesi.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]Equipment inventory listing
  5. [5]besi.combesi.com
  6. [6]solutions-on-silicon.comsolutions-on-silicon.com