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0010-22161 High EFF RF MatchversusATM 407 B 2 S CE S 293 Robot

Applied Materials 0010-22161 High EFF RF Match, Brooks ATM 407 B 2 S CE S 293 Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBrooks
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FamilyApplied Materials 0010-22161 High EFF RF MatchBrooks ATM
Specifications
MakeApplied Materials[1]Brooks / PRI[3]
Model0010-22161[1]ATM 407 B 2 S CE S 293[3]
DescriptionHTESC PH 1 REV A[2]Atmospheric top mount 3-axis Brooks PRI Equipe ATM407 robot[4]
ConditionUsed[2]Refurbished and tested[3]
Stock NumberBM6628[2]—
Configuration—Refurbished and Tested[3]
Product Model/Part#—ATM-407B-2-S-CE-S293[4]
Manufacturer—Brooks Automation[4]
Type—automation[4]
Vacuum lines—One or two vacuum lines for single/dual end-effectors[4]
Wafer sensor option—HAMA wafer sensor option[4]
Standard option—SEMI S2-93[4]
Arm link—7.2 inch arm link[4]
Z-stroke—13.3 inch Z-stroke[4]
Quantity—2 sets[5]
ID—SS5541-2023-4[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]ustechnologies.comustechnologies.com
  5. [5]semistarcorp.comsemistarcorp.com