Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus1300 X Hot Plate

Applied Materials 0010-22161 High EFF RF Match, CEE 1300 X Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsCEE
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchCEE 1300 X Hot Plate
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Vacuum and exhaust[3]
Wafer Sizes—3, 4, 5, 6, 8 inch[3]
Vacuum and Exhaust—Yes[3]
Programmable Bake Process—Up to 250,000 bake processes; unlimited steps per program[3]
Lift Pin—Yes[3]
Operation Modes—Contact, vacuum contact, nitrogen purge, proximity[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing