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0010-22161 High EFF RF MatchversusIGX 100 L

Applied Materials 0010-22161 High EFF RF Match, Edwards IGX 100 L, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
IGX 100 LEdwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards IGX 100 L
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—120 kg[3]
Voltage—230V[3]
Peak pumping speed—105 m³/h, 62 CFM, 1750 l/min[4]
AUC (Active Utility Controller) power—0.05 kW[4]
Water inlet requirement—1 slm[4]
Weight—120 kg[3]
Frequeny—50/60 Hz[4]
Inlet connection—ISO63[5]
Outlet connection—NW25 (KF25)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]ajvs.comajvs.com
  5. [5]provac.comprovac.com