Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IQDP 40, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IQDP 40Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IQDP 40 |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Typical peak pumping speed (50 Hz) | — | 44 m³ h⁻¹[4] |
| Typical peak pumping speed (60 Hz) | — | 55 m³ h⁻¹[4] |
| Displacement (swept volume) at 50 Hz | — | 52.0 m³ h⁻¹[4] |
| Displacement (swept volume) at 60 Hz | — | 62.4 m³ h⁻¹[4] |
| Ultimate vacuum (with shaft-seals purge, 50 Hz) | — | 5 × 10⁻² mbar[4] |
| Mass (pump only) | — | 186 kg[4] |
| Motor power | — | 2.2 kW[1] |
| Noise level | — | < 70 dB(A)[4] |
| Inlet connection | — | ISO40 bolted[5] |
| Exhaust connection | — | KF40[5] |
| Electrical supply | — | 3-phase, 208-230/380-415 V, 50/60 Hz[5] |