Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusSM 8 Temperature Humidity

Applied Materials 0010-22161 High EFF RF Match, Thermotron SM 8 Temperature Humidity, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SM 8 Temperature Humidity
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]SM 8[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Equipment type—Temperature / Humidity Chamber[3]
Manual title—Instruction Manual[4]
Manual page count—52 pages[4]
Manual description—Environmental Test Chamber[4]
Workspace dimensions—24 x 24 x 24 inches (61 x 61 x 61 centimeters)[5]
Workspace volume—8 ft³ (227 L)[5]
Temperature range—-70°C to +180°C (-94°F to +356°F)[5]
Humidity range—10% to 98% RH[5]
Humidity control—2.5% RH[5]
Temperature control tolerance—0.3°C (0.5°F)[5]
Approx. shipping weight—875 lbs (397 kg)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]manualslib.commanualslib.com
  5. [5]thermotron.comthermotron.com