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Comparison ledger

0010-22161 High EFF RF MatchversusNVision 40

Applied Materials 0010-22161 High EFF RF Match, Zeiss NVision 40, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsZeiss
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchZeiss NVision 40
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]NVision 40[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—208-230 V[3]
Manufacturer—Zeiss[3]
Electron microscope type—SEM-FIB[4]
SEM column—Schottky field emission Gemini column[5]
SEM operating voltage—100 V to 30 kV[5]
SEM resolution—1.1 nm at 20 kV; 2.5 nm at 1 kV[5]
FIB column—SIINT Zeta Ga+ ion FIB column[5]
FIB operating voltage—1 kV to 30 kV[5]
FIB ion current—0.1 pA to 45 nA[5]
Ion beam resolution—4 nm at 1 pA[5]
Power—208-230 V[3]
Frequency—50-60 Hz[3]
Gas delivery—Has W, C SiO2 and H20 gases installed[6]
Micromanipulator—With kleindiek mm3a micromanipulator[3]
XeF2—Option, not installed[3]
Controller status—One of the controllers on the two turbo pumps is not operational[6]
Detectors—Everhart-Thornley detector, 4 quadrant backscatter, in-lens secondary electron detector, energy selective backscatter detector[5]
Lithography system—Raith Elphy Quantum lithography system[5]
Nanoscale lithography—NanoPattern Generating System (NPGS)[7]
Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]labwrench.comlabwrench.com
  5. [5]www-em.materials.ox.ac.ukwww-em.materials.ox.ac.uk
  6. [6]waferpedia.comwaferpedia.com
  7. [7]nanoscience.ucf.edunanoscience.ucf.edu