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0015 20064 PartversusHiPace 300 Turbomolecular Vacuum

Applied Materials 0015 20064 Part, Pfeiffer HiPace 300 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0015 20064 PartApplied Materials
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0015 20064 PartPfeiffer HiPace
Cited variants—
  • HiPace 300, 24 V DC[1]
  • HiPace 300, 48 V DC[1]
Specifications
ConfigurationMod.. Rose Enclosures 33121206 Water Lea[2]With TC 400 Controller Module[4]
ManufacturerApplied Materials[3]—
Part Number0015-20064[3]—
DescriptionMOD.. ROSE ENCLOSURES 33121206 WATER LEA[3]—
OEMApplied Materials[2]—
Model0015 20064[2]—
Product type—Turbomolecular vacuum pump[5]
Electronic drive unit—TC 400[1]
Operating voltage, 24 V DC variant—24 ± 5% V DC[1]
Operating voltage, 48 V DC variant—48 ± 5% V DC[1]
Maximum power consumption, 24 V DC variant—300 W[1]
Maximum current consumption, 24 V DC variant—12.5 A[1]
Run-up time, 24 V DC variant—1.8 min[1]
Maximum power consumption, 48 V DC variant—400 W[1]
Maximum current consumption, 48 V DC variant—8.4 A[1]
Run-up time, 48 V DC variant—1.2 min[1]
Weight, ISO-K—6.7 kg[1]
Weight, ISO-F—7 kg[1]
Weight, CF-F—8.7 kg[1]
HV flange—DN 100 ISO-K, DN 100 ISO-F, or DN 100 CF-F[1]
Cooling method—Standard water, optional air[1]
Cooling water temperature—15-35 °C[1]
Cooling water consumption—50 l/h[1]
Interfaces—RS-485, Remote[1]
Ultimate pressure with On Tool DryPump—<1·10⁻⁷ mbar[1]
Rotation speed—60000 rpm (variable 20-100%)[1]
Sound pressure level—≤ 50 dB (A)[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]inventory listing
  3. [3]asseta.comasseta.com
  4. [4]inventory listing
  5. [5]pfeiffervacuum.compfeiffervacuum.com